JPH0555277B2 - - Google Patents

Info

Publication number
JPH0555277B2
JPH0555277B2 JP61018865A JP1886586A JPH0555277B2 JP H0555277 B2 JPH0555277 B2 JP H0555277B2 JP 61018865 A JP61018865 A JP 61018865A JP 1886586 A JP1886586 A JP 1886586A JP H0555277 B2 JPH0555277 B2 JP H0555277B2
Authority
JP
Japan
Prior art keywords
pad
surface plate
jig
hole
holes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61018865A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62176774A (ja
Inventor
Isao Nagahashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Speedfam Corp
Original Assignee
Speedfam Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Speedfam Corp filed Critical Speedfam Corp
Priority to JP61018865A priority Critical patent/JPS62176774A/ja
Publication of JPS62176774A publication Critical patent/JPS62176774A/ja
Publication of JPH0555277B2 publication Critical patent/JPH0555277B2/ja
Priority to DK024598A priority patent/DK24598A/da
Granted legal-status Critical Current

Links

Landscapes

  • Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
JP61018865A 1986-01-24 1986-01-30 研磨用パツドの穿孔兼取付用治具 Granted JPS62176774A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP61018865A JPS62176774A (ja) 1986-01-30 1986-01-30 研磨用パツドの穿孔兼取付用治具
DK024598A DK24598A (da) 1986-01-24 1998-02-23 Antibiotiske glycopeptider og fremgangsmåde til deres fremstilling

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61018865A JPS62176774A (ja) 1986-01-30 1986-01-30 研磨用パツドの穿孔兼取付用治具

Publications (2)

Publication Number Publication Date
JPS62176774A JPS62176774A (ja) 1987-08-03
JPH0555277B2 true JPH0555277B2 (en]) 1993-08-16

Family

ID=11983429

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61018865A Granted JPS62176774A (ja) 1986-01-24 1986-01-30 研磨用パツドの穿孔兼取付用治具

Country Status (1)

Country Link
JP (1) JPS62176774A (en])

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6273806B1 (en) * 1997-05-15 2001-08-14 Applied Materials, Inc. Polishing pad having a grooved pattern for use in a chemical mechanical polishing apparatus
JP2007266052A (ja) * 2006-03-27 2007-10-11 Nec Electronics Corp 研磨パッド、ｃｍｐ装置、研磨パッドの製造方法

Also Published As

Publication number Publication date
JPS62176774A (ja) 1987-08-03

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